- Division od Microelectronics and Nanotechnology (W12/Z1)
- Division of Vacuum and Plasma Technologies (W12/Z2)
- Division of Micro- and Nanostructures Metrology (W12/Z3)
- Division of Technology and Diagnostics of Microelectronic Structures (W12/Z4)
- Laboratory for Interconnecting and Packaging Electronic Circuits (W12/Z5)
- Division of Microsystems and Photonics (W12/Z6)
- Laboratory of Microengineering and Micromechanics (W12/P1)
Division od Microelectronics and Nanotechnology (W12/Z1)
Director: Marek Tłaczała, associate professor [ Marek.Tlaczala[at]pwr.wroc.pl ]
- Bogusław Boratyński, DSc (EngD)
- Małgorzata Kramkowska, DSc (EngD)
- Ryszard Korbutowicz, DSc (EngD)
- Waldemar Oleszkiewicz, DSc (EngD)
- Tomasz Ohly, DSc (EngD)
- Marek Panek, DSc (EngD)
- Regina Paszkiewicz, associate professor
- Bogdan Paszkiewicz, DSc (EngD)
- Damian Radziewicz, DSc (EngD)
- Zdzisław Synowiec, DSc (EngD)
- Beata Ściana, DSc (EngD)
- Iwona Zborowska-Lindert, DSc (EngD)
- Irena Zubel, associate professor
Division of Vacuum and Plasma Technologies (W12/Z2)
Director: Witold Posadowski, associate professor [ Witold.Posadowski[at]pwr.wroc.pl ]
- Andrzej Detka, DSc (EngD)
- Włodzimierz Drzazga, DSc (EngD)
- Andrzej Hałas, professor
- Czesław Kirczuk, DSc (EngD)
- Józef Kudzia, DSc (EngD)
- Janusz Markowski, DSc (EngD)
- Antoni Prajzner, DSc (EngD)
- prof. dr hab. inż. Witold Słówko
- Zbigniew Znamirowski, DSc (EngD)
Division of Micro- and Nanostructures Metrology (W12/Z3)
Director: Teodor Gotszalk, associate professor [ Teodor.Gotszalk[at]pwr.wroc.pl ]
- Zbigniew Kowalski, professor
- Janusz Kozłowski, DSc (EngD)
- Benedykt Licznerski, professor
- dr hab. inż. Karol Nitsch, prof. PWr
- Jacek Radojewski, DSc (EngD)
- Anna Sankowska, DSc (EngD)
- Przemysław Szecówka, DSc (EngD)
- Janusz Wilk, DSc (EngD)
Division of Technology and Diagnostics of Microelectronic Structures (W12/Z4)
Director: Tadeusz Berlicki, associate professor [ Tadeusz.Berlicki[at]pwr.wroc.pl ]
- Grażyna Beensh-Marchwicka, DSc (EngD)
- Maria Dąbrowska-Szata, prof. PWr
- Jarosław Domaradzki, DSc (EngD)
- Danuta Kaczmarek, associate professor
- Andrzej Mulak, professor
- Marek Muszyński, M.Sc.
- Eugeniusz Prociów, M.Sc.
Laboratory for Interconnecting and Packaging Electronic Circuits (W12/Z5)
Director: Jan Felba, associate professor [ Jan.Felba[at]pwr.wroc.pl ]
- Barbara Bober, DSc (EngD)
- Kazimierz Friedel, professor
- Bronisława Olszewska-Mateja, DSc (EngD)
- Krzysztof Urbański, DSc (EngD)
- Artur Wymysłowski, associate professor
Division of Microsystems and Photonics(W12/Z6)
Director: Leszek Golonka, professor [ Leszek.Golonka[at]pwr.wroc.pl ]
- Andrzej Dziedzic, associate professor
- Sergiusz Patela, associate professor
- Helena Teterycz, associate professor
- Tadeusz Żdanowicz, DSc (EngD)
Laboratory of Microengineering and Micromechanics (W12/P1)
Director: Jan Dziuban, associate professor [ Jan.Dziuban[at]pwr.wroc.pl ]
- Anna Górecka-Drzazga, DSc (EngD)
- Rafał Walczak, DSc (EngD)
- Sylwester Bargiel, DSc (EngD)
- Bogdan Jankowski, DSc (EngD)
- Paweł Knapkiewicz, MSc